CS3000 Range – Stage Configurations

Instrument
Type

CS3200
CS3400
CS3600
X & Y
Stage Movement

100mm x 100mm
100mm x 150mm
150mm x 150mm
CS3000 Range – Cathode Options

Model

CS3000
CS3000/LV
CS3000L
CS3000L/LV
CS3000FE
CS3000FE/LV
Cathode
Options

Tungsten (W)
LaB6
Schottky FE

SEI
Resolution

<3.0nm @ 30kV
<2.2nm @ 30kV
<1.2nm @ 25kV

Accelerating
Voltage

40kV Standard
50kV Option
40kV Standard
50kV Option
25kV Standard
30kV Option
Low Chamber
Vacuum (LV)
300Pa
(2000Pa option)
300Pa
(2000Pa option)
300Pa
(2000Pa option)
Specification of the CS3400LV – See photo above
Magnification
3x to 600,000x
Low Vacuum Mode
1-300Pa
(Choice of three selectable gases)
Apertures
4 - click stop positions
Fully Eucentric Stage
Motorisation optional
X=100mm, Y=150mm
Z, Tilt and Rotation
Motorisation optional
Z=50mm, Z'=10mm
Rotation=360º Tilt=-5 to +85º
Maximum Sample Thickness
80mm
Chamber – Internal size
315mm x 415mm x 315mm
EDX/WDX Take off angle
40º
Maximum Image Resolution
2560 x 2048
SEM High Resolution Display
Two 18" High Resolution LC Displays
SEM Control
Either by Mouse or Optional Manual Control
Comprehensive range of options available
© Obducat CamScan 2002