Accessories for the CS3000 range

Beam Blanking
Ultra high speed (<10nsec RT/FT) unit.
Located very close to the electron source, conjugate to the focal plane,
ensuring no significant movement during blanking rise/fall cycle.
Provided with micrometer alignment (X/Y) for setting on the optical axis.
Independently adjusted knife edge for setting the correct blanking
conditions and ensuring maximum sensitivity.
The blanking voltage enables beam blanking operation to 50kV with
a +5V (minimum) drive to the plates.
Recommended that impedance matching to either 50-100O is
provided at the column connector to ensure that rise/fall times of
<10nsec are achieved with normal pulse driven electronics
(normally supplied by user).
CamScan can provide a power pulse amplifier (with no duty
restrictions) if required.

Beam Current Stability Module
Enhanced beam stability control
<0.05% / hour maximum drift over a minimum period of 64 hours.

Laser Beam Locator
A low powered red laser beam, co-axial with the electron optic axis
in the column, illuminates precisely the centre of the area to be
scanned by the electron beam.
Beam sensitive or complex large samples can be very easily
positioned for microscopy and analysis.

Auto Faraday Cage
Pneumatically controlled turret which, on command, swings the
Faraday Cage into the electron beam.
Accurate digital read out of probe current displayed on Absorbed
Current Imaging module.
Particularly useful for probe current measurement during quantitative
X-ray microanalysis without the need to move sample or stage.

Stereo Optical Microscope
Used in conjunction with the Laser Beam Locator.
Stereoscopic and Vertical Beam observation.
Ideal for inclined viewing of samples set for EDX analysis.
Magnification Range x6.4 to x40.
Continuous zoom x1 to x6.
Complete with High Power automatic illuminator with fibre optic
light guides.

Selected Area Diffraction
SAD scan coil and electron optic column module to acquire selected
area diffraction (channelling patterns from areas as small as
10µm diameter.
The SAD coil is attached to the standard SEM aperture selector unit.

Chamber Airlocks
A range of airlocks are available for these models.
They offer:
Enhanced Analytical Stability
Rapid Sample Exchange
Minimum Pump Down Time

Absorbed Electron Imaging
Provides absorbed current images from specimens mounted in
chamber
EBIC images available from semiconductor samples under electron
beam irradiation.
Enables sample probe current to be measured for quantitative
analytical applications.
Interfaces to MX25-AFC Auto Faraday Cage module to measure
probe current directly.
Overall current range : 10-5 - 10-13 Amps.


Back Scattered Detectors

Four Channel Solid State BSD
4-Quadrant high sensitivity annular solid state detector.
Symmetric detection of back scattered electrons over large working
distance range.
Excellent Atomic Number (Z) contrast imaging: Z differences of
< 0.1Z at Z=30 detectable.
Independent selection of each quadrant in either polarity for sum and
difference studies to be made for topographical imaging of samples.

Robinson Scintillator BSD
Large area scintillator detector for backscattered electron detection.
Integral Photomultiplier Tube.
Fully retractable detector mounted on rear chamber accessory port.
Excellent atomic number (Z) imaging and resolution Z differences.

Cathodoluminescence Systems
CamScan offer a number of C/L systems.
EBSD Systems
EDX Systems
WDX Systems